構造体、光学部材、反射防止膜、撥水性膜、質量分析用基板、位相板、構造体の製造方法、及び反射防止膜の製造方法

Structure, optical member, antireflection film, water-repellent film, mass analysis substrate, phase plate, method of manufacturing structure, and method of manufacturing antireflection film

Abstract

PROBLEM TO BE SOLVED: To provide: an antireflection film having a high antireflection effect and a manufacturing method therefor; an optical member excellent in antireflection effect; a water-repellent film having an excellent water-repellent property; a mass analysis substrate having a high detection sensitivity; a phase plate having high accuracy; and a structure capable of being used therefor, and a manufacturing method therefor.SOLUTION: A structure 11 having a plurality of cone parts (protrusion parts 12) on a surface thereof, is configured so that the cone part (protrusion part 12) has a mesostructure, and the mesostructure is a structure having a meso hole 13.
【課題】反射防止効果が高い反射防止膜およびその製造方法、反射防止効果に優れた光学部材、優れた撥水性を有する撥水性膜、検出感度の高い質量分析用基板、高精度な位相板、それらに用いることができる構造体およびその製造方法を提供する。 【解決手段】表面に複数の錐体部(凸部12)を有する構造体11であって、前記錐体部(凸部12)がメソ構造を有し、前記メソ構造がメソ孔13を有する構造であることを特徴とする。 【選択図】図1

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    WO-2016017457-A1February 04, 2016ウシオ電機株式会社Fluorescence light source device and production method therefor